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Model-Based Feedback Control Design

A cornerstone of our technology is Model-Based Feedback Control Design. This involves development of a physics-based computer model of the system to be controlled (e.g. thermal model of an RTP system). The model (generally nonlinear) is then validated using actual data from the system. The order and complexity of the model depends on the application, but are typically large at the validation stage. A reduced-order model is constructed for feedback control system design.

The closed-loop control system is first evaluated via computer simulations. Once the performance meets (or exceeds) specification, the feedback controller is used to control the actual system. This approach not only provides physical insight into the open-loop and closed-loop behavior of the system but can also be used to extract maximum performance from a given system.

Apart from its role in controller development, the physical model enables evaluation of design modifications to the system through computer simulations prior to any hardware modifications. In essence, we construct a “virtual” engineering environment where system designs are evaluated and optimized before expensive hardware is purchased or fabricated.

Our Model-Based Feedback Control Development Process provides for a systematic and seamless process for modeling, simulation, controller design and development. This approach enables us to extract maximum performance from complex multi-input, multi-output processes which have a high degree of interaction between various process inputs and outputs. Traditional single-input, single-output design approaches limit the level of performance that can be achieved in systems with strong coupling.

The Payoff

Use of our controller design and development technology leads to an overall efficient process for the design and development of the next-generation equipment. It not only provides our customers with a competitive technological edge but also reduces equipment development costs and time-to-market.