Tradeoffs in Temperature Control of Fast-Ramp RTO and RTA Systems

D. de Roover, A. Emami-Naeini, J. L. Ebert, R. L. Kosut, Tradeoffs in Temperature Control of Fast-Ramp RTO and RTA Systems,  Proceedings of the Seventh International Conference on Advanced Thermal Processing of Semiconductors, RTP '99, Colorado Springs, September 1999.

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