Model-Based Control of Fast-Ramp RTP Systems

D. de Roover, A. Emami-Naeini, J. L. Ebert, S. Ghosal, and G. W. van der Linden, Model-Based Control of Fast-Ramp RTP Systems, Proceedings of the Sixth International Conference on Advanced Thermal Processing of Semiconductors, RTP '98, Kyoto, Japan, September 9-11, 1998.

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