Efficient CFD Modeling of Single Wafer Semiconductor Systems for Closed-Loop Evaluation

J. L. Ebert, G. W. van der Linden, R. L. Kosut, and A. Emami-Naeini, Efficient CFD Modeling of Single Wafer Semiconductor Systems for Closed-Loop Evaluation, Proceedings of the 36^th IEEE Conference on Decision and Control, pp. 830-831, December, 1997.

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