Efficient CFD Modeling of Single Wafer System for Closed-Loop Evaluation

J. L. Ebert, G. W. van der Linden, R. L. Kosut, and A. Emami-Naeini, Efficient CFD Modeling of Single Wafer System for Closed-Loop Evaluation, Proceedings of the Fifth International Conference on Advanced Thermal Processing of Semiconductors, RTP '97, New Orleans, LA, September 3-5, 1997.

Download publication (application/pdf, 233.2 kB)