Multi-Scale Model of the RF Diode Sputter Deposition of GMR Thin Films

S. Ghosal, R. L. Kosut, J. L. Ebert, A. Kozak, T. E. Abrahamson, W. Zou, X. W. Zhou, J. F. Groves, Y. G. Yang, H. N. G. Wadley, D. Brownell, and D. Wang, Multi-Scale Model of the RF Diode Sputter Deposition of GMR Thin Films, Application notes, 2000.

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