Reactor-Scale Models for RF Diode Sputtering of Metal Thin-Films

S. Desa, S. Ghosal, R. Kosut, J. L. Ebert, T. E. Abrahamson, A. Kozak, W. Zou, X. W. Zhou, J. F. Groves, and H. N. G. Wadley, Reactor-Scale Models for RF Diode Sputtering of Metal Thin-Films, Journal of Vacuum Science & Technology A, Vol. 17, No. 4, pp. 1926-1933, 1999.

Download publication (application/pdf, 403.3 kB)