Custom Software for Semiconductor and Advanced Materials
SC Solutions has developed several custom software packages for manufacturing and diagnostics in the semiconductor and advanced materials industries.
Fault Detection Software for Thermal Processing Chamber
Software designed to detect failure in the heating lamp assembly, and implemented using MFC.
Test Bench for Pyrometers Used in Thermal Processing
Designed software for automatic testing and report generation for pyrometers and associated hardware. The software is implemented using MFC.
MHz-rate Controller for Cantilever-based Atomic-scale Probe
Software designed to perform simultaneous estimation/control of the frequency, phase, and amplitude of a cantilever close to a sample surface in a Magnetic Resonance Force Microscope (MRFM). Software was implemented in C and VHDL on a combined DSP/FPGA hardware platform and all algorithms and data manipulation are implemented digitally. A LabView GUI was implemented to help to interface with the controller.
End-point Controller for Sputter Process
Software was designed to acquire data and perform real-time control of the applied RF power output in a RF diode sputter chamber. Software implemented in ANSI C on a x86-based platform running a real time version of Linux (RT-Linux). End-point controller received a voltage measurement (via A/D) which was then integrated to obtain a measure of the power and ended the process when the specified recipe value was reached.
Feedback Controller for Molecular Beam Epitaxy (MBE) Chamber
Software was designed for closed-loop control of epitaxial growth of III-V semiconductor materials. Reflective High Energy Electron Density (RHEED) and Photo Emission Oscillation (PEO) sensors were used to monitor wafer surface morphology. III-V flux was controlled by changing the temperature of effusion cells for the sources. A GUI was developed to change controller parameters and interface with the existing MBE software. Software implemented using Windows SDK and Java.
Match Controller for Plasma Etch System
Developed customized digital impedance matching controllers for a low-pressure, high-density Transformer Coupled Plasma (TCP) polysilicon etch system. The controller was designed using MatrixX-Systembuild and implemented in ANSI C after integration in the customer’s real-time environment.
Flux Controller for E-beam PVD
Developed real-time feedback controller for multiple sources in electron-beam Physical Vapor Deposition (PVD) of superconducting thin films. Controller software implemented in ANSI C on a x86-based platform running a real time version of Linux (RT-Linux). The GUI was developed using LabView.
Real-time Data Acquisition Software for Thermal Processing
Developed a DAQ with GUI on a x86-based platform running real time version of Linux (RT-Linux). System supported up to 80 analog inputs. MFC and Java GUI’s were developed to provide interfaces.