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Semiconductor

Rapid Thermal Processing (RTP)
Chemical Mechanical Planarization (CMP)
Epitaxy

The Systems & Control Division of SC Solutions provides semiconductor equipment modeling, real-time control, and intelligent processing of advanced materials. A key to our enabling technology is our physical modeling of systems and processes, which allows us to accurately predict system behavior due to configuration or component modifications. The resulting models are also suitable for use in feedback control design and subsequent development of embedded controllers. The use of this technology provides our customers with a competitive technological edge thereby reducing equipment development costs and providing for rapid time-to-market. Our expertise includes:
  • Rapid Thermal Processing (RTP)
  • Chemical Mechanical Planarization (CMP)
  • Epitaxy
  • High Pressure Vertical Furnace
  • Pressure/Flow Control