SC Solutions: Value Through Innovation
SC Solutions provides innovative engineering solutions to our clients in the fields of
advanced process control, aerospace, mechanical, and structural engineering.
Our engineers are among the most talented in their fields.
They bring deep experience and extraordinary focus to their work and deliver exceptional results.
SC Solutions Structural Engineering provides solutions to owners and designers of critical infrastructure seeking to understand and mitigate risks associated with high-consequence structural performance.
We combine our technical expertise and unique experience with advanced technologies to help our clients realistically characterize the behavior and performance of structures subjected to extreme events. This ensures that facilities and systems are maintained for safe and reliable operation under even the most demanding conditions.
SC Solutions Control Engineering provides custom process control and modeling solutions to semiconductor manufacturing, advanced materials manufacturing, energy, aerospace, and defense industries.
Our high-performance, model-based control software is used in key processes in integrated circuit (IC) manufacturing.
Our controllers help our customers extract maximum performance out of their equipment. We leverage our physics-based models for equipment design, virtual sensing and fault diagnostics.
Additionally, we conduct innovative research in control systems.
SC Solutions Mechanical & Aerospace Engineering provides value-added solutions for a wide range of applications: spacecraft, launch vehicle, rocket engine, airframe, defense, entertainment, robotics & controls, manufacturing tools, biotech equipment, industrial & mining apparatus, and more.
Our creative and collaborative team have multidomain expertise combined with decades long real-world experience in a wide range of industry applications.
We use a suite of well-established and industry-accepted software for which we have well-trained resources with years of industry experience.
Featured Projects & Case Studies
SC Solutions staff are providing their insight and experience relating to the space industry to the ASME Robotics Technology Group (RTG). The RTG is conducting a Robotics Roadmapping Session on Sunday, August 14, 2022 in conjunction with IDETC-CIE. The workshop includes thought-provoking speakers/panelists and a facilitated, topical breakout workshop. As part of the RTG, SC […]read more
SC Solutions will again be a sponsor for the annual Advanced Process Control Smart Manufacturing (APCSM) Conference and will give an in-person presentation there on the application of Digital Twins technology to semiconductor wafer processing. The APCSM conference, which will be in hybrid format this year, addresses APC, AI, and Smart Manufacturing (SM) needs and […]read more
On Monday, April 25, 2022 at 1pm EDT, SC Solutions’ Director of Mechanical and Aerospace Engineering, Joseph R. Smith, will be moderating an ASME Town Hall, where Dr. Michael Roberts, Chief Scientist of the International Space Station (ISS) National Laboratory will be talking about the cutting-edge research being conducted in Lower Earth Orbit and what […]read more
SC Solutions, today announced the transfer of all its stock into an Employee Stock Ownership Plan (ESOP), making the company 100 percent employee-owned. Gregory Loy, President of SC Solutions, said “The key to SC Solutions’ success since founding the company in 1989 has been the quality of the work done by our employees. We have […]read more
At the AMSE E-Fest Careers 2021 virtual event, November 13, SC Solutions’ Vice-President, and ASME’s current President, Dr. Mahantesh Hiremath; Dr. Columbia Mishra, Senior Staff Systems Architecture Engineer of Maxar Technologies, Inc.; and Danielle Richey, a systems engineer, architect, and program manager at Lockheed Martin will lead an “Ask Me Anything” session focused on careers […]read more
ASME and IMECE Information Panel, “Nuclear Power in Space Applications: Promise, Practice, and Challenges”
SC Solutions’ Director of Mechanical and Aerospace Engineering, Joseph R. Smith, will moderate the Information Panel, “Nuclear Power in Space Applications: Promise, Practice, and Challenges”, at the International Mechanical Engineering Congress & Exposition (IMECE) on Monday, November 1, at 2:15 EST. Panelists include Dr. Christina Back, Vice President, Nuclear Technologies and Materials, General Atomics Douglas […]read more
SC Solutions has been a proud sponsor of the Advanced Process Control Smart Manufacturing (APCSM) Conference for the past several years, including the 2021 Virtual Conference that was held on October 5-6. Several SC team members attended the conference sessions online. The APCSM Conference addresses the process control and Smart Manufacturing needs and solutions for […]read more
SC Solutions Inc. is pleased to have been selected to serve as the engineering supplier for Seismic Protection for Mechanical, Electrical & Miscellaneous Equipment to support the construction of a communications center (FTG233) for the Missile Defense Integration & Operations Center (MDIOC) at Fort Greely Air Force Station in Alaska. The US Army Corps of Engineers […]read more
SC Solutions Congratulates Mahantesh Hiremath, Ph.D., P.E., FASME on becoming the 140th President of ASME
SC Solutions extends our congratulations to Dr. Mahantesh Hiremath on beginning his term as the 140th President of the American Society of Mechanical Engineers. Dr. Hiremath, who is Vice-President of Mechanical and Aerospace Engineering at SC Solutions, is an ASME Fellow, and has been an active member of ASME since 1997. He served as a member […]read more
DOE Awards Phase II STTR Grant to SC and Princeton to Develop Software for Quantum Control & Optimization
Press Release The U.S Department of Energy (DOE) has awarded a Phase II STTR grant to SC Solutions and Princeton University to develop a software toolset for quantum control and related optimization and calibration protocols. This STTR program will leverage the vast library of control and optimization algorithms developed at SC Solutions and Princeton University […]read more
SC Solutions delivered to East Bay Municipal Utility District (EBMUD) the results of a thermal analysis of the containment structure of their waste gas burners. EBMUD’s Main Wastewater Treatment Plant (MWWTP) in Oakland, CA operates a digester facility where biodegradable wastes in sewage, food scraps and grease from local restaurants are mixed together with other […]read more
SC Solutions is pleased to welcome Joseph Smith, to our team as the Director of our Mechanical and Aerospace Division. Joe has a proven track record of leading teams to provide creative solutions to complex, multi-disciplinary problems in aerospace and mechanical engineering. Joe has over 20 years of experience in aerodynamics, aerospace development, spacecraft and […]read more
SC Solutions was a sponsor of the COMSOL Conference 2020 North America on October 7-8, 2020. The event was a Virtual Conference this year. SC is a Certified Consultant for COMSOL and several team members from SC Solutions attended the conference. The attendees had a firsthand look at the possibilities of multiphysics modeling and numerical […]read more
SC Solutions was a proud sponsor of the Advanced Process Control Smart Manufacturing (APCSM) 2020 Virtual Conference on October 6-7, 2020. The APCSM Conference was a Virtual Conference this year and several team members from SC Solutions attended. The APCSM Conference addresses process control and Smart Manufacturing needs and solutions for the semiconductor and related […]read more
SC Solutions and Hyundai Motors successfully completed a program on use of COMSOL Multiphysics for optimizing the process of induction hardening of gears. During this collaborative research project, Mr. Si-Yup Lee of Hyundai spent a year at SC Solutions’ offices in Sunnyvale as a researcher in residence. The team worked closely to develop finite element […]read more
SC Solutions and Neotek Energy, Inc. successfully completed a project for the DARPA-sponsored research program on the Physics of Artificial Intelligence (PAI). The team developed a novel concept referred to as a Dynamic Feedback Loop (DFL) to ‘bake in’ the physics of the system into the design of a deep neural network (DNN). The specific […]read more
Dr. Mahantesh Hiremath, VP of SC Solutions was nominated to become 140th President of The American Society of Mechanical Engineers (ASME) on 16 June 2020. His term of office will commence in June 2021. ASME was founded in 1880 to provide a forum for engineers to discuss the concerns brought by the global rise of […]read more
SC Solutions Awarded Phase II of the Small Business Innovative Research (SBIR) Program to Develop Digital Twin and Computer Vision Technology for Operational Monitoring and Maintenance of Bridges
The United States Department of Transportation (USDOT) has awarded SC Solutions additional funding to advance the development of a physical technology prototype for the integration of Digital Twin and Computer Vision Technology through Phase II of the SBIR Program. As part of Phase II, SC Solutions is developing computer vision and non-destructive evaluation techniques aided […]read more
SC Solutions is pleased to welcome Dr. Mahantesh Hiremath to lead our Mechanical and Aerospace practice. Dr. Hiremath has over 30 years of wide-ranging industry experience in space, energy, transportation and infrastructure. He is among a handful of engineers in the world who have designed and analyzed complex systems in four environments – deep underground […]read more
To meet the need for real-time profile control (RTPC) on Applied Materials 200mm Mirra® CMP tools, Applied turned to its long-time partner, SC Solutions, Inc. Together, the two companies tackled a variety of technical issues. Read this article in the July issue of Applied Materials’ NANOCHIP FAB Solutions Technology Journal to learn more about how […]read more
SC Solutions was one of the sponsors of the 31st annual Advanced Process Control (APC) Conference in San Antonio, TX on October 28-31, 2019. This year, Dr. Jun Kyu Lee, Dr. Abbas Emami-Naeini and Dr. Dick de Roover attended the conference and presented some ground-breaking work on the theory and application of Physics-Informed Machine Learning […]read more
Sunnyvale, California – SC Solutions Inc. (SC) announced today that it has shipped another SC-MDD™ system, SC’s in-line whole-wafer scanner for detecting macro defects. This is a repeat order for one of SC’s customers, a major data storage company who has found great value from SC-MDD™ performing flawlessly in their fab over the past two […]read more
SC Solutions, in partnership with TerraPower and Professor Andrew Whittaker, is proud to have been selected by the U.S. Department of Energy (DOE) for a Regulatory Assistance Grant to lead the development of software verification and validation (V&V) guidance for nonlinear soil-structure interaction (SSI) analysis of advanced nuclear facilities. This work represents a critically important […]read more
The SC Solutions team has won a Small Business Technology Transfer (STTR) Phase I funding from U.S. Army Research Laboratories to develop the necessary software to help commercialize a scalable software tool for validation and verification of quantum systems, such as quantum computers. Quantum information processors are rapidly transitioning from small-scale, research-grade experiments to full-stack, […]read more
SC Solutions is pleased to welcome Dr. Norman Abrahamson, a leading authority in engineering seismology, to our team. Dr. Abrahamson has made invaluable contributions to advancing scientific knowledge and practical applications in the fields of seismic hazard assessment, engineering seismology, and earthquake engineering. He has extensive experience in ground motion development, risk assessment, and seismic […]read more
SC Solutions is pleased to announce that, effective January 31, 2019, we have further upgraded our Nuclear Quality Assurance (NQA) program. With this upgrade, our NQA program complies with the following standard and regulations: American Society of Mechanical Engineers (ASME) NQA-1-2008 edition with the NQA-1-2009 addenda (including subpart 2.7). Title 10, U.S. Code of Federal […]read more
The SC team has won Phase I funding from DARPA in the Physics of Artificial Intelligence (PAI) program for “infusing” physics into current AI techniques to provide rapid and accurate insights into future performance of dynamic non-linear systems.read more
SC Solutions Engineers Present Recent Work at Department of Energy’s Natural Phenomena Hazards Meeting
SC Solutions’ Engineers, Dr. Asa Bassam, Dr. Julio Garcia, Ms. Natalie Doulgerakis, and Dr. Ben Kosbab participated in the Natural Phenomena Hazards (NPH) Meeting, co-sponsored by the Department of Energy (DOE) and the U.S. Nuclear Regulatory Commission (NRC), held October 23-24, 2018 at the NRC Headquarters in Rockville, MD. The meeting was focused on improving […]read more
Dr. Abbas Emami-Naeini and Dr. Dick de Roover attended the Advanced Process Control (APC) conference at the Airport Hilton Hotel in Austin, TX October 8-11. SC Solutions sponsored the reception in this 30th year of the conference which addressed the APC needs and solutions for the semiconductor and related industries that also require high precision […]read more
SC Solutions Receives Small Business Innovative Research Award (SBIR) to Develop Digital Twin Technology for Operational Monitoring and Maintenance of Bridges
The Department of Transportation (DOT)-Federal Highway Administration (FHWA) recently awarded a Small Business Innovation Research (SBIR) grant to SC Solutions to develop an innovative technology framework for operational monitoring and damage diagnosis of bridge structures. Called Digital Twin, the technology is an integration of high-fidelity finite element (FE) models with sensor data through advanced model […]read more
The Earthquake Engineering Research institute (EERI) selected a paper co-authored by Dr. Hamed Ebrahimian as the Outstanding Earthquake Spectra Paper of 2016 (Vol. 32). The award announcement was made during the 11th National Conference on Earthquake Engineering (11NCEE) in Los Angeles (June 25-29, 2018). The paper, entitled “Landmark Data Set from the Building Nonstructural Components […]read more
SC Solutions is a collaborating partner on a research and technology development team led by the State University of New York at Buffalo (UB) on a project for the U.S. Department of Energy (DOE) titled Reducing Overnight Capital Cost of Advanced Reactors Using Equipment-based Seismic Protective Technologies. The project was awarded funding by the DOE […]read more
SC Solutions is excited to announce that the Structural Engineering Division office in the Atlanta, GA area has relocated to a larger space. The new office is in the Brumby Building at historic Marietta Station, located just a few short blocks away from the traditional city center of Marietta Square. Since opening its first Atlanta office […]read more
Dr. Jon Ebert was an invited speaker at COMSOL Day at the Hyatt House San Jose/Silicon Valley on May 16. The conference was an opportunity for COMSOL users to exchange ideas with other simulation specialists in the COMSOL community. SC is a Certified COMSOL Consultant, and has been a COMSOL user for over a decade. […]read more
Dr. Ben Kosbab (Principal Engineer at SC Solutions) presented the benefits of using seismic isolation to simplify and standardize nuclear power plant designs at a plenary session of the 2018 International Congress on Advances in Nuclear Power Plants (ICAPP). The theme of the plenary session was on leveraging innovations in construction technologies to reduce new […]read more
Matthew Bowers, P.E. M.ASCE of SC Solutions was honored by the American Society of Civil Engineers (ASCE) as the Outstanding Younger Civil Engineer in the State of California for 2017.read more
Dr. Jon Ebert attended the 15th annual DOE SSL R&D Workshop in Nashville, TN, January 29–31, 2018, where experts and researchers from universities, labs, and companies large and small met to share the latest on Solid State Lighting (SSL) technology advances and explore new directions in lighting. The conference offered the researchers an opportunity to […]read more
SC Solutions sponsored a small group of Colorado high school students to participate in a Techstars Startup Weekend held January 19-21. The students participate in the Computer Technology program at the Mesa County Valley Career Center. Startup weekends are a global phenomenon where entrepreneurial-minded people come together for an intensive 54-hour weekend to pitch a […]read more
Sound Transit’s East Link Extension Project is featured in the Popular Science magazine as one of the 100 greatest innovations of 2017. The project involves extending light rail transit (LRT) from Seattle to Bellevue, WA, on the Homer M. Hadley Floating Bridge (WSDOT I-90). When the Extension opens for service, it would be the world’s […]read more
Dr. Abbas Emami, Dr. Jon Ebert, and Dr. Dick de Roover attended the Automatic Process Control (APC) conference October 9-12 in Austin, Texas, where SC Solutions sponsored the October 10 reception. The conference provided an opportunity to network with experts and managers from a broad cross-section of the semiconductor, memory, LED, solar devices, flat panel, […]read more
Dr. Sarbajit Ghosal attended the COMSOL Conference in Newton, MA, October 4-6. The conference brought together Multiphysics modelers from academia, industry and government research labs spanning a wide range of modeling applications. It was an opportunity for SC, a Certified COMSOL Consultant, to compare notes with fellow modelers, and learn about the features of the […]read more
SC Solutions is excited to announce that the Structural Division office location in East Bay California has moved from Walnut Creek to Oakland City Center. This transition brings us closer to many of our valued clients and partners in order to further our commitment of providing responsive service and value-added collaboration. The Oakland City Center […]read more
SC Solutions’ Phoebe Cheng Presents Performance Based Design with Nonlinear 3D Dynamic SSI and FSI Analysis at PBD-III Conference
Ms. Phoebe Cheng (Principal Engineer at SC Solutions) presented a case study on the seismic analysis and performance-based retrofit design of several large buried water storage reservoirs at the 3rd International Conference on Performance-based Design in Earthquake Geotechnical Engineering (PBD-III). The conference was hosted by the International Society of Soil Mechanics and Geotechnical Engineering (Technical […]read more
Matthew Bowers, P.E. M.ASCE of SC Solutions was honored by the Innovation Contest judges in ASCE’s 2017 Grand Challenge initiative for a paper submission in the Internet of Things category. From a diverse group of ideas, the judges selected three overall-award recipients and recognized further winners in five categories. ASCE’s Industry Leaders Council debuted the […]read more
SC Solutions Engineer Quoted in News Article Highlighting Innovative “Track Bridge” Solution for Sound Transit’s East Link Extension Project
Chuck Ruth, PE, SE, of SC Solutions was quoted in a news article by the Seattle Times reflecting on the challenges involved with the addition of light rail transit (LRT) on the I-90 Homer M. Hadley floating bridge. The article highlights the innovative engineering solution required to successfully build and operate the world’s first LRT […]read more
SC Solutions staff joined our colleagues and friends in celebrating the contributions of women in transportation at the 2017 Puget Sound Women in Transportation Seminar (WTS) Gala. The WTS Gala is an annual awards and scholarship dinner to recognize “outstanding transportation projects, programs, and people in the Puget Sound area.”read more
Dr. Emami and Dr. de Roover attended the seventh SEMICON China trade show at the Shanghai New International Expo Center over three days from March 14 through March 16. The conference is the premier platform for exhibitors and visitors to explore the entire China’s semiconductor industry supply chain. Apart from offering insights into the future direction […]read more
SC Solutions is proud to welcome back Chuck Ruth, PE, SE as a valued member of the SC team in Seattle, WA. Alex Krimotat, VP of Structural Engineering for SC, notes: “We are excited to have Chuck re-join SC Solutions to continue strengthening our transportation infrastructure engineering support services, particularly in the Pacific Northwest. His […]read more
Dr. Jon Ebert and Dr. Jun Kyu Lee attended the 14th annual DOE SSL R&D Workshop at Hyatt Regency, Long Beach where top experts from universities, labs, and companies large and small converged to share the latest on advances in solid state lighting (SSL) technology. The workshop examined market forces that are shaping SSL technology, […]read more
In support of WTS’s vision to promote lifelong careers in transportation for women, SC Solutions sponsored a table for staff, friends and colleagues to participate in an inspiration-filled evening at the Women in Transportation Seminar (WTS) Sacramento Chapter Annual Awards and Scholarship dinner.read more
SC is one of five companies selected for Award of Small Business Innovation Research – Small Business Technology Transfer Program (SBIR-STTR) Grants for SSL Technology development awarded by Department of Energy in its FY17 Phase I Release 1. This project seeks to demonstrate the feasibility of an innovative control technology for improved within-wafer temperature uniformity […]read more
Dr. Sarbajit Ghosal attended the 2016 SSL Technology Development Workshop in Denver on November 16 and 17, 2016. Organized by the U.S. Department of Energy, this meeting brought together manufacturers, scientists, and end users in the Solid State Lighting (SSL) Industry to share diverse perspectives and identify what needs to be done to leverage the […]read more
SC Solutions Sponsors Reception and Presents Model-Based Tuning Approach at XVIII Advanced Process Control Conference in Phoenix, Arizona
The Integrated Measurement Association (IMA) hosted the 23rd annual Advanced Process Control (APC) Conference in Phoenix, AZ on Oct. 17 to 20. This conference brings together equipment suppliers, device manufacturers, metrology suppliers and software solution providers in the semiconductor, solar devices, flat panels, LEDs and MEMs manufacturing industries. SC Solutions has been a long-time attendee […]read more
SC Solutions’ Ben Kosbab and Payman Tehrani Present Recent Work at Department of Energy’s Natural Phenomena Hazards Meeting
The U.S. Department of Energy (DOE) Chief of Nuclear Safety (CNS) hosted a two-day technical meeting in Germantown, MD on the characterization and mitigation of Natural Phenomena Hazards (NPH) related to nuclear facilities. The meeting brought together DOE staff, Nuclear Regulatory Commission (NRC) staff, researchers, and private sector consultants, to discuss and advance the knowledge […]read more
SC is one of six companies selected for award of Small Business Innovation Research – Small Business Technology Transfer Program (SBIR-STTR) Grants for SSL Technology development awarded by Department of Energy in its FY16 Phase I Release 1. This project proposes to develop an innovative temperature control technology for use in metal-organic chemical vapor deposition […]read more
Matt Bowers, Phoebe Cheng and Jay Lin of SC Solutions attended the 2014 ASCE Region 9 Symposium on Friday, March 14. The event was held at Delancy Street Foundation at The Embarcadero in San Francisco. The Symposium featured a presentation on Devil’s Slide, a tunnel project that is part of SC’s portfolio of work. The […]read more
By invitation from the Mexican Society of Geotechnical Engineering (SMIG), the Mexican Society of Structural Engineering (SMIE) and the Mexican Society of Earthquake Engineering (SMIS), Julio Garcia of SC Solutions presented a seminar on the topic of “Seismic Analysis of Nuclear Power Plants” at the Mexican Association of Civil Engineers, in Mexico City. Dr. Garcia […]read more
SC Solutions engineers Hassan Sedarat and Iman Talebinejad presented two papers at the Western Bridges Engineers’ Seminar in Reno, Nevada. Dr. Sedarat presented his work on developing “An Innovative Procedure for Load Rating of Suspension Bridges.” This paper highlights an analytical approach to develop component-specific demands calibrated to actual bridge condition and performance. Titled “Innovations […]read more
SC Solutions has doubled its already extensive capacity for in-house modeling and analysis with the acquisition of five 32-core dedicated analysis servers. SC staff can now better serve our clients, tackling much larger models and more complex analyses than in the past via advanced high-performance computing (HPC) capabilities, while also shortening analysis computation time. Update [September […]read more
Dr. Jon Ebert, Director of Systems and Control at SC Solutions gave a Webinar on August 6, entitled, “Simulating Feedback Control of Thermal Systems using COMSOL”. Many manufacturing processes, such as semiconductor and materials processing, rely on feedback control to maintain their required yield and performance. In this webinar, Dr. Ebert demonstrated a systematic approach […]read more
SC Solutions was awarded a 7-year Rail Delivery Partner (RDP) contract, as part of WSP Parsons Brinkerhoff’s team for the next phase of the California High Speed Rail (HSR) Project. SC Solutions provides technical support to the RDP team, including engineering design criteria development and program-level design-build construction support. SC Solutions was previously part of […]read more
The March 2014 issue of the ASCE Civil Engineering magazine includes coverage of the Sound Transit project to install light-rail tracks on the Homer Hadley floating bridge in the state of Washington. The Homer Hadley is the widest and fifth-longest floating bridge in the world. In addition to a well-written profile of the design and […]read more
SC Solutions proudly supported the 9th Nuclear Plants Current Issues Symposium: Moving Forward, in Charlotte, NC., as a Silver Sponsor. The Symposium brought together engineers, utility owners, regulators, policy makers, researchers, and many others from across the industry to discuss current issues and to share lessons learned. The topics ranged from implementation of the recommendations […]read more
Iman Talebinejad and Hassan Sedarat presented two papers at SPIE/Smart Structures NDE 2014 in San Diego, CA. SPIE is the international society for optics and photonics. The conference was held at the Town & Country Resort and Convention Center in San Diego on March 9-13, 2014. The papers are available for purchase at the SPIE […]read more
SC Solutions Honored with Two American Council of Engineering Companies Engineering Excellence Awards
SC Solutions was recently honored with two Engineering Excellence awards from ACEC, the American Council of Engineering Companies. The ACEC California’s 2014 Engineering Excellence Awards & Legislative Reception was held on Monday, February 3, 2014 at the Hyatt Regency in Sacramento. The two awards presented to SC Solutions were both Honor Awards. The two projects […]read more
Sean M. O’Connor and Jerome P. Lynch, Ph.D. Department of Civil and Environmental Engineering, University of Michigan Mohammed Ettouney, Ph.D. Weidlinger Associates, New York, NY Gwen van der Linden, Ph.D. SC Solutions, Sunnyvale, CA Sharada Alampalli, Prospect Solutions, Loudonville, NY Wireless sensor technologies offer inexpensive sensors that can be installed in bridges with great ease. […]read more
SC Solutions’ I-90 Work Featured by Sound Transit at 2013 Annual Transportation Research Board Meeting
The 2013 Annual Transportation Research Board Meeting was held January 13-17, 2013 in Washington, D.C. One of the presentations at the conference featured the work of SC Solutions. “I-90 Track Bridge Project for Sound Transit” was presented by John Harrison of Parsons Brinkerhoff and John Sleavin of Sound Transit on Tuesday, January 15, 2012. Analysis […]read more
SC Solutions team presents “Experimental Validation of Model of Electro-Chemical-Mechanical Planarization (ECMP) of Copper” at COMSOL conference in Boston
The SC Solutions team, consisting of Dr. Jon Ebert, Dr. Sarbajit Ghosal, Dr. Dick de Roover, and Dr. Abbas Emami-Naeini, presented “Experimental Validation of Model of Electro-Chemical-Mechanical Planarization (ECMP) of Copper” at the COMSOL conference in Boston, October 3-5, 2012. This paper describes the development of a COMSOL model of Electro-Chemical-Mechanical Planarization (ECMP) that was validated […]read more