Dick de Roover, Ph.D.

Dick de Roover, Ph.D.

Dick de Roover, Ph.D.

Principal Research Engineer, Systems & Control

Dr. de Roover received his M.S. and Ph.D. degrees in mechanical engineering with specialization in control systems from Delft University of Technology, the Netherlands, in 1993 and 1997, respectively. He has 18 years of control systems design experience.

At SC Solutions,  Dr. de Roover has been actively involved in modeling and control of semiconductor manufacturing equipment such as Rapid Thermal Processing (RTP) systems and Chemical Mechanical Polishing (CMP), lithography bake developer systems, and metal-organic chemical vapor deposition (MOCVD) systems. In this field he has experience with physical modeling, signal processing, real-time feedback control, control implementation and software. He is the author of over 25 technical papers and 4 US patents.