SC-MDD™ Macro Defect Scanner

SC-MDD™ Macro Defect Scanner Rapid In-line Detection of Macro Defects The complexity of integrated circuits (ICs) continues to increase with shrinking device geometries. There is an associated increase in the number of processing steps to manufacture IC’s and...

Model-Based Temperature/CD Tuning of Multi-Zone Heated Plates

Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...