Digital Control of Dynamic Systems – Third Edition

This well-respected work discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and...

SC‐MDD™ Compact Whole‐Wafer Scanner

SC Solutions’ Macro Defect Detection system, SC‐MDD™, is a production‐proven tool that rapidly detects and classifies macro defects for every wafer being processed. SC‐MDD™ includes scanner hardware as well as SC‐WDD™ software which controls the scanning process,...

Reactor-scale Modeling of Silicon Epitaxy

This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...