Oct 1, 2020
SC Solutions’ Macro Defect Detection system, SC‐MDD™, is a production‐proven tool that rapidly detects and classifies macro defects for every wafer being processed. SC‐MDD™ includes scanner hardware as well as SC‐WDD™ software which controls the scanning process,...
Oct 1, 2020
This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...
Oct 1, 2020
Physics-based MOCVD models are useful in many ways including model-based control, design of next-generation chambers, virtual sensing and process optimization. As a capability demonstration, SC Solutions has developed a finite element (FEM) model of a chamber shown...
Oct 1, 2020
The modeling team at SC Solutions has developed fluid flow models for a broad range of applications for more than two decades. These models have been developed primarily using the commercial finite element (FEM) modeling tool, COMSOL® Multiphysics, for which SC is a...
Aug 24, 2020
Abstract We present a robust control system and methodology for physics-informed artificial intelligence (PAI) used to optimize and improve oil recovery, demonstrated in the Yates Field operated by the Kinder Morgan CO2 company. The system consists of a robust control...
