Digital Control of Dynamic Systems – Third Edition

This well-respected, market-leading text discusses the use of digital computers in the real-time control of dynamic systems. The emphasis is on the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in...

SC‐MDD™ Compact Whole‐Wafer Scanner

SC Solutions’ Macro Defect Detection system, SC‐MDD™, is a production‐proven tool that rapidly detects and classifies macro defects for every wafer being processed. SC‐MDD™ includes scanner hardware as well as SC‐WDD™ software which controls the scanning process,...

Reactor-scale Modeling of Silicon Epitaxy

This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...
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