This Case Study describes an approach to combining physical principles with Machine Learning (ML) for modeling and control of complex systems. Our approach was developed as part of a DARPA-funded research project. It was applied to oil reservoir management. While this...
This case study of epitaxial deposition of silicon film on a silicon substrate in a horizontal hot-wall reactor reproduces an earlier modeling study by Habuka et al. [1]. The steady-state finite element (FEM) model incorporates fluid flow, heat transfer, dilute...
Physics-based MOCVD models are useful in many ways including model-based control, design of next-generation chambers, virtual sensing and process optimization. As a capability demonstration, SC Solutions has developed a finite element (FEM) model of a chamber shown...
The modeling team at SC Solutions has developed fluid flow models for a broad range of applications for more than two decades. These models have been developed primarily using the commercial finite element (FEM) modeling tool, COMSOL® Multiphysics, for which SC is a...
A reactor-scale model incorporating the principal physical processes involved in RF diode sputtering has been developed and then integrated into a detailed steady-state input-output model of the growth of copper films. The model links critical aspects of the process...
