Model-Based Temperature/CD Tuning of Multi-Zone Heated Plates

Driven by ever-increasing requirements on improved wafer temperature uniformity for smaller features on the wafer, equipment manufacturers are developing heated plates (or chucks) with more and more actuator zones to achieve finer resolution of the actuated heat. From...

Seismic Analysis of Nuclear Power Plants

Attending an invitation from the Mexican Society of Geotechnical Engineering (SMIG), the Mexican Society of Structural Engineering (SMIE) and the Mexican Society for Earthquake Engineering (SMIS), Julio Garcia of SC Solutions presented a lecture on the topic: Seismic...