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Home > Control Engineering > Publications > Reactor-Scale Models for RF Diode Sputtering of Metal Thin-Films

Reactor-Scale Models for RF Diode Sputtering of Metal Thin-Films

S. Desa, S. Ghosal, R. Kosut, J. L. Ebert, T. E. Abrahamson, A. Kozak, W. Zou, X. W. Zhou, J. F. Groves, and H. N. G. Wadley

Journal of Vacuum Science & Technology A, Vol. 17, No. 4, pp. 1926-1933, 1999.

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